@Article{TanUDRBTDI:2004:TrPoPl,
               author = "Tan, Ing Hwie and Ueda, M{\'a}rio and Dallaqua, Renato 
                         S{\'e}rgio and Rossi, Jos{\'e} Osvaldo and Beloto, Ant{\^o}nio 
                         Fernando and Tabacniks, M. H. and Dermaquette, N. R. and Inoue, 
                         Y.",
          affiliation = "{Instituto Nacional de Pesquisas Espaciais (INPE)} and {Instituto 
                         Nacional de Pesquisas Espaciais (INPE)} and {Instituto Nacional de 
                         Pesquisas Espaciais (INPE)} and {Instituto Nacional de Pesquisas 
                         Espaciais (INPE)} and {Instituto Nacional de Pesquisas Espaciais 
                         (INPE)} and {Instituto de F{\'{\i}}sica da USP} and {Escola 
                         Polit{\'e}cnica da USP} and {Nagoya University}",
                title = "Treatment of polymers by plasma immersion ion implantation for 
                         space applications",
              journal = "Surface and Coatings Technology",
                 year = "2004",
               volume = "186",
               number = "1-2",
                pages = "234--238",
                month = "Aug.",
                 note = "{7th International Workshop on Plasma-Based Ion Implantation}",
             keywords = "plasma immersion, aluminum implantation, RBS.",
             abstract = "Kapton samples were implanted with aluminum in order to create a 
                         metal oxide layer for protection against atomic oxygen degradation 
                         in space environment. Three different approaches were used. First, 
                         an aluminum plasma was created by vacuum are discharge in a 
                         magnetic field, and samples were implanted by plasma immersion. 
                         Although sample charging charging problems prevented implantation 
                         at significant depths, an ion mixing layer was formed, as shown by 
                         X-ray Photoelectron Spectroscopy (XPS) depth profile analysis, 
                         giving superior adhesion of the aluminum film to the substrate. In 
                         a second approach, a 20-nn amuminum film was deposited on a Kapton 
                         sample by electron beam, followed by nitrogen plasma immersion ion 
                         implantation. Rutherford Backscattering Spectroscopy (RSB) 
                         analysis did not show significant recoil implantation of aluminum, 
                         and the process resulted in a cracked film, possibly due to the 
                         formation of a estressed aluminum nitride layer. In a third 
                         approach, direct aluminum implantation by plasma immersion was 
                         made without a confing magnetic field. Charging problems are 
                         minimized in this low-density plasma, but an increase of a factor 
                         of 10 in treatment time was not enough to compensate the much 
                         lower dose implanted per pulse. This was reveales by oxygen 
                         degradation tests made by submitting the treated samples to RF 
                         oxygen plasmas and measuring the mass loss. The sample implanted 
                         in magnetically confined palsmas conserved its transparency and 
                         had negligible mass loss. Unconfined plasmas also resulted in a 
                         degradation protection layer but only in small patches of the 
                         substrate since the low dose and possibly a misalignment resulted 
                         in poor uniformity. Thermal transients followed by adhesion tests 
                         showed that direct implantation gives the necessary adhesion of 
                         the protective layer in order to withstand the harsh space 
                         environment.",
           copyholder = "SID/SCD",
                  doi = "10.1016/j.surfcoat.2004.04.029",
                  url = "http://dx.doi.org/10.1016/j.surfcoat.2004.04.029",
                 issn = "0257-8972",
             language = "en",
           targetfile = "1-s2.0-S0257897204002749-main.pdf",
        urlaccessdate = "20 maio 2024"
}